Nanoscale Measurements With a Through-Focus Scanning Optical Microscope

نویسندگان

  • Ravikiran Attota
  • Thomas A. Germer
  • Richard M. Silver
چکیده

Introduction In the current world of nanotechnology, fast and reliable measurement of nanoscale features is extremely useful. It is further advantageous if the analytical tools used are cost-effective and have high throughput, such as optics-based tools. In conventional optical microscopy, it is usually deemed necessary to acquire images at the “best-focus” position for meaningful analysis. However, the out-of-focus images do contain useful information regarding the target. On the basis of this, we introduce a new method for nanoscale dimensional analysis with nanometer sensitivity using a conventional optical microscope. The method is called the through-focus scanning optical microscope (TSOMpronounced “tee-som”) imaging method.[1-5] The TSOM method is applicable to 3D targets, enabling the method to be used for a wide range of target geometries.

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تاریخ انتشار 2009