Nanoscale Measurements With a Through-Focus Scanning Optical Microscope
نویسندگان
چکیده
Introduction In the current world of nanotechnology, fast and reliable measurement of nanoscale features is extremely useful. It is further advantageous if the analytical tools used are cost-effective and have high throughput, such as optics-based tools. In conventional optical microscopy, it is usually deemed necessary to acquire images at the “best-focus” position for meaningful analysis. However, the out-of-focus images do contain useful information regarding the target. On the basis of this, we introduce a new method for nanoscale dimensional analysis with nanometer sensitivity using a conventional optical microscope. The method is called the through-focus scanning optical microscope (TSOMpronounced “tee-som”) imaging method.[1-5] The TSOM method is applicable to 3D targets, enabling the method to be used for a wide range of target geometries.
منابع مشابه
Effects of Temperature on Radiative Properties of Nanoscale Multilayer with Coherent Formulation in Visible Wavelengths
During the past two decades, there have been tremendous developments in near-field imaging and local probing techniques. Examples are the Scanning Tunneling Microscope (STM), Atomic Force Microscope (AFM), Near-field Scanning Optical Microscope (NSOM), Photon Scanning Tunneling Microscope (PSTM), and Scanning Thermal Microscope (SThM).Results showed that the average reflectance for a dopant con...
متن کاملNanoparticle size and shape evaluation using the TSOM optical microscopy method
We present a novel optical through-focus scanning optical microscopy (TSOM) method that produces nanoscale dimensional measurement sensitivity using a conventional optical microscope. The TSOM method uses optical information from multiple focal planes for dimensional analysis. The TSOM method can be used for nanoscale dimensional and defect analysis for a wide variety of target geometries and s...
متن کاملOptical and electrical characterization at the nanoscale with a transparent probe of a scanning tunnelling microscope.
A new type of scanning probe microscope, combining features of the scanning tunnelling microscope, the scanning tunnelling luminescence microscope with a transparent probe and the aperture scanning near-field optical microscope, is described. Proof-of-concept experiments were performed under ultrahigh vacuum conditions at varying temperature on GaAs/AlAs heterostructures.
متن کاملEffect of Annealing Temperature on the Structural, Magnetic and Optical Properties of SrCo2Fe16O27 Hexaferrite Nanostructure
In this paper, W-type SrCo2Fe16O27 hexaferrite nanostructures were synthesized by sol-gel auto-combustion method. Effect of annealing temperature on the structural, magnetic and optical properties of these SrCo2Fe16O27 nanostructures was investigated. In order to determine the annealing temperature of samples, the prepared gel was examined by thermo-gravimetric and differential-thermal analyses...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2009